中图分类号：TN407
文献标志码：A
DOI: 10.16157/j.issn.0258-7998.223543
中文引用格式： 姚龙，李晓峰，马聪伟，等. 基于阻抗匹配器的二极管幅-相检测电路设计[J]. 电子技术应用，2023，49(7)：120-125.
英文引用格式： Yao Long，Li Xiaofeng，Ma Congwei，et al. Design of amplitude-phase detection circuit for impedance match[J]. Application of Electronic Technique，2023，49(7)：120-125.

Design of amplitude-phase detection circuit for impedance match

Abstract： Nowadays, the competition in the field of domestic semiconductor largely depends on the competition of semiconductor equipment and core components, such as RF power supply, impedance match, etc. The anti-interference ability and stability of the equipment are important criteria for judging the quality of equipment. For the impedance match equipment, the accuracy, stability and fast response of the control loop are important indicators that determine the performance of this product. Therefore, this paper designs a hardware circuit about amplitude-phase signal detection loop based on the related principles of capacitor voltage sampling, current transformer sampling and op amp circuit, and uses the ADS2021 to obtain the analog quantity Urms representing the impedance matching degree between RF power supply and load. The simulation experimental results show that a larger Urms value indicates a greater mismatch between the RF power supply and load, and a smaller Urms value indicates a better match between the RF power supply and load. At the same time, by changing the input power of the bus signal, it is obtained that the Urms has a high linear correlation with input power, so the detection loop has good stability and can be applied to the detection of impedance match.

Key words : impedance match；Urms；amplitude-phase signal；linear correlation